Degree | Type | Year | Semester |
---|---|---|---|
4314939 Advanced Nanoscience and Nanotechnology | OT | 0 | A |
• To know in depth the most common methods of nanostructuring of surfaces.
• Understand in detail the performance and limitations of the main methods of lithography.
• To enable students to design a process for the fabrication of devices and nanostructures.
• Gain practical knowledge on the use of nanofabrication equipment.
• Know the state of the art in nanofabrication and the main directions of the current evolution lines of this discipline.
- In-depth description of the main methods of nanofabrication, both top-down and bottom-up. Training for the use of equipment and work in Clean Room.
- Lithography Electron beam dose calculation. Selection of resists. Methods of alignment. Mix and Match with other techniques. Operation of software and equipment. Practical realization of nanodevices. Post-processing
- Nanostructuring by replication. Design and manufacture of molds. Practical realization of nanostructures.
- Bottom-up strategies. Preparation of layers. Selective deposition techniques and self-organization. Surface functionalization. Growth of nanostructures.
Annotation: Within the schedule set by the centre or degree programme, 15 minutes of one class will be reserved for students to evaluate their lecturers and their courses or modules through questionnaires.
Title | Hours | ECTS | Learning Outcomes |
---|---|---|---|
Type: Directed | |||
Laboratory Practices | 10 | 0.4 | |
Lectures | 10 | 0.4 | 4 |
Problem-based Learning | 6 | 0.24 | |
Type: Supervised | |||
Process design | 25 | 1 | |
Type: Autonomous | |||
Personal work / reports / Autonomous lab work | 40 | 1.6 | 4, 2 |
Reading research articles and state-of-the art literature | 20 | 0.8 | |
Seminars | 5 | 0.2 |
It will be evaluated the student's ability to perform a complete nanofabrication process, from the design and selection of individual processes, to the implementation and final characterization. There will be special emphasis on the documentation submitted and analytical skills of the students.
It is possible to have the chance to increase the mark of the synthesis exam in an extra test (only for those students that has carried out all previous evaluations along the course, irrespective of the marks).
Title | Weighting | Hours | ECTS | Learning Outcomes |
---|---|---|---|---|
Delivery of reports | 10 % | 20 | 0.8 | 4 |
Exams | 30 % | 2 | 0.08 | 5, 6 |
Oral presentation of work | 25 % | 2 | 0.08 | 4, 2 |
Practical works realization | 40 % | 10 | 0.4 | 1, 3, 7 |
Use of free software to dessign micro(nano)structures.