Degree | Type | Year | Semester |
---|---|---|---|
2501922 Nanoscience and Nanotechnology | OB | 4 | 1 |
It is recommended to attend the subject simultaneously or later to Nanofabrication.
The general objective of the course is that the student knows the main principles of transduction, the different structures and also the architectures involved in sensing and actuation with a micro/nanometric scale device. Special emphasis will be made for the effects of the reduction of the dimensions to the nanometer scale
Unit 1. Introduction
Definition of basic concepts (sensor / actuator / transducer). Micro and nanosystems versus micro and nanoelectromechanical systems (MEMS-NEMS). Historical origin Micro and nanosystem technology. Relationship with microelectronics technology and micro and nanofabrication techniques. Industrial applications and market prospects.
Unit 2. Transducer elements.
Basic MEMS mechanical structures: levers, bridges, membranes. Materials and principles of transduction: piezo-resistive, piezoelectric, electrostatic, optical, electromagnetic.
Unit 3. Architectures and principles of operation
Micro and nanosystems DC (static) and AC (dynamic or resonant). Techniques of actuation and detection. Digital and analogue architectures for the transduction, conditioning, amplification and transmission of the signal.
Unit 4. Modeling and simulation
Modeling and simulation of transducer elements: finite element simulation tools (FEM). Mechanical, electronic, electromagnetic and other transduction domains. Modeling and simulation at the system level.
Unit 5. Dimensional scaling
Study of the effects of dimensional scaling on the characteristics and merit figures of micro and nanosystems. Advantages of microsystems with respect to systems of millimetric dimensions. Limits of scaling in the nano regime.
Unit 6. Applications of micro and nanosystems
Sensors: temperature, pressure, displacement, acceleration, force, flow, gases, mass. Applications to chemical and biological sensing. Optical applications Actuators: micromotors, microvals, microswitches. Signal processors: RF-MEMS, micro oscillators, filters, mixers. Power generation: scavengers, fuel micropiles.
Practices
-Design and simulation of an M / NEMS
Theoretical classes Explanation by the teacher of the fundamental concepts of each of the topics. Part
of the concepts will be introduced as a resolution of specific cases.
Problem classes Resolution and discussion of from the exercises and problems
delivered to students.
Laboratory. Practical work in the specific laboratory. Part of the work will have a specific section that will require a previous resolution based on mathematical calculations or by simulation tools.
Annotation: Within the schedule set by the centre or degree programme, 15 minutes of one class will be reserved for students to evaluate their lecturers and their courses or modules through questionnaires.
Title | Hours | ECTS | Learning Outcomes |
---|---|---|---|
Type: Directed | |||
Concepts and theoretical teaching | 27 | 1.08 | 1, 2, 5, 9, 12, 10, 13, 15, 19, 23, 26, 27, 29, 31, 30, 14 |
Laboratory | 15 | 0.6 | 1, 2, 8, 4, 5, 3, 18, 17, 16, 22, 23, 27, 28, 29, 25, 14, 32, 34, 7, 6 |
Practical lessons with exercises | 10 | 0.4 | 2, 20, 13, 24, 21, 19, 22, 23, 26, 27, 29, 25, 30, 33, 32 |
Type: Autonomous | |||
Exercises solving | 20 | 0.8 | 20, 13, 24, 21, 19, 23, 26, 27, 29, 30, 33, 32 |
Reading, resolution and writing of the laboratory reports | 20 | 0.8 | 2, 8, 5, 13, 18, 17, 16, 23, 26, 28, 14, 34, 7 |
Study for the assimilation of concepts | 46 | 1.84 | 2, 20, 24, 16, 19, 22, 30, 33 |
Title | Weighting | Hours | ECTS | Learning Outcomes |
---|---|---|---|---|
Delivery of a written report on the design of a Micro / nanosystem. | 20% | 4 | 0.16 | 1, 20, 4, 5, 9, 10, 13, 24, 21, 15, 16, 19, 22, 23, 26, 27, 29, 31, 30, 14, 33, 34, 7 |
Laboratory work evaluation | 30% | 2 | 0.08 | 2, 8, 4, 5, 13, 3, 24, 21, 18, 17, 16, 22, 23, 27, 28, 29, 25, 31, 30, 14, 34, 7, 6 |
Written partial exams (2) | 25% per partial exam | 6 | 0.24 | 5, 9, 12, 11, 10, 13, 15, 18, 17, 16, 19, 26, 27, 29, 31, 30, 14, 32 |
Analysis and design principles of MEMS devices. Minhang, Bao. ISBN: 978-0-444-51616-9, (2005), eBook
Understanding MEMS : Principles and Applications, Luis Castañer, Willey, ISBN: 978-1-119-05542-6 (2015), eBook
-MEMS Mechanical Sensors (Artech House microelectromechanical systems (MEMS) series), Steve Beeby et al. ISBN: 978-1-58053-536-6 (2004), eBook
Handbook of Nanotechnology. B. Bhushan. Springer-Verlag, (2004).
- Fundamentals of Microfabrication. The Science of Miniaturization (2nd edition). M.J. Madou. CRC Press, (2002).
- Microsystems Design. S.D. Senturia. Kluwer Academic Publishers (2001).
- Sensors. Vol.7. Mechanical Sensors. W. Göpel, J. Hesse, J.N. Zemel. Wiley-VCH.
- Sensors (Update). Vol.4. H. Baltes, W. Göpel, J. Hesse. Wiley-VCH.
- D. Sarid. Scanning Force Microscopy. Oxford University Press, (1991).
- RF MEMS. Theory, design and technology. G.M. Rebeiz. John Wiley and Sons (2003).
- Practical MEMS. Ville Kaajakari. Small Gear Publishing. ISBN: 978-0-9822991-0-4 (2009).
- Handbook of Transducers. Harry N. Norton. Ed. Prentice-Hall. Englewood Cliffs, NJ, 1989.
- Semiconductor Sensors, S.M. Sze editor, Ed. John Wiley & Sons, New York, 1994
- Sensor Materials, P.T.Moseley and A.J. Crocker, Ed. Institute of Physiscs Publishing (IOP), London 1996
- Sensor technology and devices, L. Ristic editor, Ed. Artech House, Boston 1994
- Microsensors, Principles and Applications, J.W. Gardner, Ed. John Wiley & sons, Chichester, 1994
- Sensors and Tranducers, M.J. Usher and D.A. Keating, Ed. Macmillan, London, Second Edition 1996
Elmer, software finite elements modelization, http://www.elmerfem.org/blog/documentation/
Salome, software for the design of the systems for software Elmer, https://www.salome-platform.org/
Pspice, software for the electrical simulation, https://www.orcad.com/pspice-free-trial